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The 21st Symposium on Microelectronics Technology and Devices

SBMicro 2006

Submission Page


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Use the fields below to make your submission. Follow the instructions, and then use the 'Submit' button at the bottom of the form.


Title of Submission:


List of Authors:

Please enter the complete list of authors for your submission, in the order in which they will appear on the abstract. You can add as many author slots as you want, to accommodate the total number of authors for your submission.

First name(s) Last name Email Institution
#1
#2
#3
#4
#5
#6
#7
#8
#9
#10
#11
#12
#13
#14
#15

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Summary:

Type (or cut-and-paste) a short ASCII summary for your submission. It should not include the author/title information, which was already entered above. You must enter plain ASCII text only, and you may not exceed 300 words.


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Keywords/Topics:

Please use the list of topics below to characterize your submission. Check all categories that seem appropriate.

Cleaning
Education
Electrical Characterization
Integrated circuits
Ion Implantation
Lithography
Materials characterization
Micromachines
Microstructures
Modeling
Nanotechnology
Non silicon compounds
Optical devices
Other process steps
Packaging
Plasma Processing
Semiconductor manufacturing
Semiconductors
Simulation
IC and MEMS processing
Nanoelectronics
Silicon-On-Insulator Technology
Novel Materials and Devices
Device Characterization
Reliability
Sensors and Actuators
Technology CAD
Packaging
Technology Roadmaps
Wirebonding
Thermal Effects and Models
Other



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